NUMERICAL STUDY OF PARTICLES GENERATION AND FLOW IN SiH4/H2 DISCHARGE

Hala F. El Welily, Hany A. Abdel-Mohsen, Fatma El Tokhi

Abstract


This paper contains a self consistent numerical study of fluid model in one dimension for the SiH4/H2 plasma discharge. Fluid model equations are solved for all species and particles specified in the model. Energy equation is solved only for electron species. The solution scheme is based on the explicit finite difference technique using Scharfetter-Gummel method for discretization. A coupling with a chemical model that investigate the nucleation and growth of all species contained in the discharge was performed. Different ion-ion, ion-molecule and molecule-molecule reactions leading to particle growth are taken into account. The results are focused on the average distribution of all species considered in the model and its flow inside the plasma bulk and at boundaries. The obtained results are of great agreement with other referred theoretical and experimental publications

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